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Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen, Volker Saile, and Jürg Leuthold: Springer, 2015 519 pages, $99.00 (e-book $69.99) ISBN 978-3-662-44394-1
MRS Bulletin, suppl. Engineered Nanomaterials in Aerospace; Warrendale Vol. 40, Iss. 10, (Oct 2015): 881-881.
DOI:10.1557/mrs.2015.253
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Title
Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen, Volker Saile, and Jürg Leuthold
Pages
881-881
Publication year
2015
Publication date
Oct 2015
ISSN
08837694
e-ISSN
19381425
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
1720406477
Copyright
Copyright © Materials Research Society 2015





