Content area

Details

Title
Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen, Volker Saile, and Jürg Leuthold
Pages
881-881
Publication year
2015
Publication date
Oct 2015
Publisher
Springer Nature B.V.
ISSN
08837694
e-ISSN
19381425
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
1720406477
Copyright
Copyright © Materials Research Society 2015