Precision of Time Conversion of the Linear Dimensions of a Part in a Pneumatic Measuring Device with Variable Output Throttle

Abstract

A new pneumatic measuring device that implements a conversion of the linear dimension of a part into the length of time it takes to empty a measurement chamber, with discharge through an output throttle, is considered. The area of the flow section of the throttle is related to the dimension of the part. An analytic model to estimate the speed and error of such a device, which amounts to ±0.5 [mu]m in the range 30-300 [mu]m with length of the measurement cycle less than 0.5 sec, is proposed.