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Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics
Abels, Claudio; Mastronardi, Vincenzo Mariano; Guido, Francesco; Dattoma, Tommaso; Qualtieri, Antonio
; et al.
Sensors; Basel Vol. 17, Iss. 5, (2017): 1080.
DOI:10.3390/s17051080
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