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In Situ Analysis of Oxygen Vacancies and Band Alignment in HfO2/TiN Structure for CMOS Applications
Xu, Da-peng; Yu, Lin-jie; Chen, Xu-dong; Chen, Lin; Sun, Qing-qing
; et al.
Nanoscale Research Letters; Heidelberg Vol. 12, Iss. 1, (Apr 2017): 1-6.
DOI:10.1186/s11671-017-2068-y
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