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ABSTRACT: The paper presents the MEMS devices and their applications that provide micro and nanodimensional functions in all the important areas. These are microsystems obtained by integrating mechanical elements, materials with special properties (ferrous, piezo- etc.) and electronic components on a common substrate (usually encapsulated on silicon/glass plates) by specific micro-manufacturing technologies. Miniaturized systems have a much faster reaction time, faster analyzes and results, automated increased possibilities with lower risks and costs. For this reason, most researches are made in order to realise small-scale versions of the existing systems for micro and nano levels. One of the most important areas in wich MEMS are in continous development is Medicine.
KEYWORDS: Nanotechnology, MEMS, biosensors, micro, medicine.
1. INTRODUCTION
1.1 Introduction in Nanotechnology
„NANOTECHNOLOGY" is a collective term for technological developments on a very small, nanometric scale [1].
Nanotechnology is the science that works with atoms and molecules, representing any technology that relies on the ability of building complex structures, respecting atomic specifications and using mechanical synthesis [6]. Its purpose is to build extremely small devices. The design, characterization, production and application of structures, devices and systems is achieved by controlling the form and the size on a "nanometric" scale [3]. In a restrictive sense this is the science of materials whose properties depend on dimensions [4].
A nanometer represents the billionth (10-9) part of a meter, that is, 0.000 000 001 meters or a millionth part of a millimeter. Nanotechnologies manage materials with nanometer scale sizes, approximately between 1 and 100 nm. This scale is called nanoscale. Some examples that define this scale are presented in Figure 1[5] and Figure 2 [17].
Miniaturization is important for the development of macroscopic systems and devices, because the benefits of scaling laws can be used effectively. Among all these reasons, which confirm the fact that miniaturization presents so many innovation opportunities of the products in different areas, we find the following:
- Minimizing energy and materials consumption during the manufacturing process;
- Redundancy and matrix;
- Integration with electronic systems, simplifying the systems (eg.: single point vs. multipoint measurements);
- Reducing the power budget;
- Improved thermal management;
- Increasing selectivity and sensitivity;
- Minimal invasiveness;
- Wider dynamic range;
- Cost / performance benefits;
- Improved reproducibility;