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Wafer emissivity independent termperature measurements
Abedrabbo, S; Tong, F M; Ravindra, N M; Gelpey, J; et al.
Journal of Electronic Materials; Warrendale Vol. 27, Iss. 12, (Dec 1998): 1323.
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Title
Wafer emissivity independent termperature measurements
Author
Abedrabbo, S; Tong, F M; Ravindra, N M; Gelpey, J; et al
Pages
1323
Publication year
1998
Publication date
Dec 1998
ISSN
0361-5235
e-ISSN
1543-186X
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
204845896
Copyright
Copyright Minerals, Metals & Materials Society Dec 1998





