Content area

Details

Title
High resistivity measurement of SiC wafers using different techniques
Author
Muzykov, P G; Khlebnikov, Y I; Regula, S V; Gao, Y; Sudarshan, T S
Pages
505-510
Section
Regular issue paper
Publication year
2003
Publication date
Jun 2003
Publisher
Springer Nature B.V.
ISSN
0361-5235
e-ISSN
1543-186X
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
204920702
Copyright
Copyright Minerals, Metals & Materials Society Jun 2003