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High resistivity measurement of SiC wafers using different techniques
Muzykov, P G; Khlebnikov, Y I; Regula, S V; Gao, Y; Sudarshan, T S.
Journal of Electronic Materials; Warrendale Vol. 32, Iss. 6, (Jun 2003): 505-510.
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Title
High resistivity measurement of SiC wafers using different techniques
Author
Muzykov, P G; Khlebnikov, Y I; Regula, S V; Gao, Y; Sudarshan, T S
Pages
505-510
Section
Regular issue paper
Publication year
2003
Publication date
Jun 2003
ISSN
0361-5235
e-ISSN
1543-186X
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
204920702
Copyright
Copyright Minerals, Metals & Materials Society Jun 2003





