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High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2
Cartamil-Bueno, Santiago J; Steeneken, Peter G; Tichelaar, Frans D; Navarro-Moratalla, Efren; Venstra, Warner J; et al. arXiv.org, May 19, 2015.You might have access to this document
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