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Abstract
Michael Polcari became president and CEO of Sematech (Austin, Texas) in February 2003. He has led the launching of two Sematech subsidiaries, ATDF and the International Sematech Manufacturing Initiative (ISMI), and overseen the inauguration of the Advanced Materials Research Center (AMRC) in Austin, a collaboration involving Sematech and Texas universities. In a recent interview, Polcari says that the company has had some very good results stemming from its technical programs. Sematech has an excellent advanced-gate technology program that is working on high-k metal gate problems. It has made very good progress in understanding the process implications of mobility degradation, and how to resolve some of the issues. The company has been doing good work in film characterization and reliability. Sematech has also managed to do quite a bit of work on immersion lithography, by running several workshops and helping to find answers for some of the critical questions that the industry has had.