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Highly Reliable 4H-SiC Epitaxial Wafer with BPD Free Recombination-Enhancing Buffer Layer for High Current Applications
Itoh, Hironori; Enokizono, Taro; Miyase, Takaya; Hori, Tsutomu; Wada, Keiji
; et al.
Materials Science Forum; Pfaffikon Vol. 1004, (Jul 2020): 71-77.
DOI:10.4028/www.scientific.net/MSF.1004.71
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