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Achievement of polarity reversion from Al(Ga)-polar to N-polar for AlGaN film on AlN seeding layer grown by a novel flow‐modulation technology
Zhang, Jin; Zhang, Xiong; Fan Aijie; Chen, Shuai; He Jiaqi
; et al.
Journal of Materials Science. Materials in Electronics; New York Vol. 32, Iss. 6, (Mar 2021): 7858-7866.
DOI:10.1007/s10854-021-05510-8
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