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Abstract
Arc-PVD coatings Zr-B-Si-C-Ti-N and Zr-B-Si-C-Ti were obtained using combined evaporated ZrB2-SiC-Ti cathodes in a residual atmosphere of N2 and Ar. Their structure and composition were investigated. The Zr-B-Si-C-Ti-N coating has a predominantly amorphous structure, formed mainly on the basis of nitride, carbide, boride phases and complex compounds Zr, Si, Ti. The Zr-B-Si-C-Ti coating is characterized by an amorphous-nanocrystalline structure. The amorphous component of this coating is formed mainly by phases based on Zr and Si. The nanocrystalline structure is formed by a complex carbide (Zr, Ti) C.
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Details
1 National University of Science and Technology «MISiS», 119049, 4, Leninskiy prospect, Moscow, Russia