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Abstract
The paper presents the results of numerical simulation of nonstationary sublimation of spherical particles of Cr(acac)3, floating in the volume of a binary mixture (argonsuperheated vapor of precursor) in a reactor with hot walls. The influence of the vapor content, reactor wall temperature and radiative heat transfer on the kinetics of sublimation/desublimation are analyzed. The characteristic times of induction and total sublimation, as well as the intensity of mass entrainment from the surface of particles of different sizes are determined. The influence of radiation from the hot walls of the sublimator on these parameters is determined.
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Details
1 Novosibirsk Sate Technical University NETI, 20 K. Marks Ave., Novosibirsk, Russia
2 Novosibirsk Sate Technical University NETI, 20 K. Marks Ave., Novosibirsk, Russia; Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Ac. Lavrentyev Ave., Novosibirsk, Russia
3 Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, 1 Ac. Lavrentyev Ave., Novosibirsk, Russia