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Abstract
X-ray synchrotron and laboratory source radiation is used to solve a wide range of problems in modern science. Compound refractive lenses (CRLs) technology is a popular solution for focusing x-ray. However weak interaction of X-ray radiation with matter puts extra challenges for microfabrication techniques and materials. Two-photon lithography has been successfully applied for polymer CRL microfabrication. However polymer material is likely to degrade in intense X-ray beams. This article describes pyrolysis (heating in inert atmosphere) as an improvement of two-photon lithography technique. This extra step may produce ultrasmall curvature radii CRLs with extra durability in intense X-ray beams
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1 Faculty of Physics, Lomonosov Moscow State University, 1/2 Leninskie Gory, Moscow 119991, Russia