Abstract

This article discusses the process of preparation of a silicon surface for subsequent growth of dilute nitride alloys by molecular-beam epitaxy. The method of preparation of Si (100) and Si (111) substrates was developed. This method provides reproducible high-quality silicon surface for molecular-beam epitaxy of Si-GaP heterostructures. As a result, it managed to reduce the eviction oxide temperature below 800 °C, which is an important parameter for the MBE technology.

Details

Title
Preparation of a silicon surface for subsequent growth of dilute nitride alloys by molecular-beam epitaxy
Author
Lazarenko, A A 1 ; Berezovskaya, T N 1 ; Denisov, D V 1 ; Sobolev, M S 1 ; Pirogov, E V 1 ; Nikitina, E V 1 

 Nanoelectronics Lab, St. Petersburg Academic University, St. Petersburg 194021, Russia 
Publication year
2017
Publication date
Nov 2017
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2574471468
Copyright
© 2017. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.