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(S)TEM analysis of the interdiffusion and barrier layer formation in Mn/Cu heterostructures on SiO2 for interconnect technologies
Lozano, J G; Lozano-Perez, S; Bogan, J; Wang, Y C; Brennan, B
; et al.
Journal of Physics: Conference Series; Bristol Vol. 371, Iss. 1, (Jul 2012).
DOI:10.1088/1742-6596/371/1/012037
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