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Chemical analysis of nickel silicides with high spatial resolution by combined EDS, EELS and ELNES
Verleysen, E; Bender, H; Schryvers, D; Vandervorst, W.
Journal of Physics: Conference Series; Bristol Vol. 209, Iss. 1, (Feb 2010).
DOI:10.1088/1742-6596/209/1/012057
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