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Influence of the gas flow of Argon and the distance between substrate and plasma on properties of Al-doped zinc oxide films
Jiang, Y J; Zhang, D X; Cai, H K; Tao, K; Xue, Y
; et al.
Journal of Physics: Conference Series; Bristol Vol. 152, Iss. 1, (Mar 2009).
DOI:10.1088/1742-6596/152/1/012030
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