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Large-area and low-damage processes for hybrid flexible device fabrications with reactive high-density plasmas driven by multiple low-inductance antenna modules
Setsuhara, Yuichi; Takenaka, Kosuke; Cho, Ken; Han, Jeon G.
Journal of Physics: Conference Series; Bristol Vol. 165, Iss. 1, (May 2009).
DOI:10.1088/1742-6596/165/1/012042
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