Content area

Abstract

Small collection-electrode monolithic CMOS sensors profit from a high signal-to-noise ratio and a small power consumption, but have a limited active sensor volume due to the fabrication process based on thin high-resistivity epitaxial layers. In this paper, the active sensor depth is investigated in the monolithic small collection-electrode technology demonstrator CLICTD. Charged particle beams are used to study the charge-collection properties and the performance of devices with different thicknesses both for perpendicular and inclined particle incidence. In CMOS sensors with a high-resistivity Czochralski substrate, the depth of the sensitive volume is found to increase by a factor two in comparison with standard epitaxial material and leads to significant improvements in the hit-detection efficiency and the spatial and time resolution.

Details

1009240
Identifier / keyword
Title
Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD
Publication title
arXiv.org; Ithaca
Publication year
2022
Publication date
Aug 30, 2022
Section
Physics (Other)
Publisher
Cornell University Library, arXiv.org
Source
arXiv.org
Place of publication
Ithaca
Country of publication
United States
University/institution
Cornell University Library arXiv.org
e-ISSN
2331-8422
Source type
Working Paper
Language of publication
English
Document type
Working Paper
Publication history
 
 
Online publication date
2022-09-28
Milestone dates
2022-04-22 (Submission v1); 2022-08-30 (Submission v2)
Publication history
 
 
   First posting date
28 Sep 2022
ProQuest document ID
2654737233
Document URL
https://www.proquest.com/working-papers/comparison-different-sensor-thicknesses-substrate/docview/2654737233/se-2?accountid=208611
Full text outside of ProQuest
Copyright
© 2022. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.
Last updated
2022-09-29
Database
ProQuest One Academic