Research on Rapid Measurement Technology of Roughness Based on Light Scattering

Abstract

The roughness is an important parameter to evaluate the parts surface quality, so it is very important to measure the surface roughness of high-precision parts. In order to meet the needs of rapid and non-contact measurement of surface roughness, a new method based on optical scattering distribution is proposed in this paper. By analyzing the modulation effect of surface roughness on incident light, the relationship between surface roughness and scattering distribution is established. Based on the analysis of the characteristics of light source, detector and their relative position, the scattered light distribution measurement system is constructed. In the measurement system, the surface roughness is measured by real-time acquisition of scattering distribution. The roughness of different samples is measured by this method and white light interferometer, and the measurement standard deviation is less than 0.15nm. The measurement results show that this method is feasible and effective.