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DEFECTS IN SILICON OXYNITRIDE FILMS
Futatsudera, M; Kimura, T; Matsumoto, A; Inokuma, T; Kurata, Y; et al. Thin Solid Films. Vol. 424, no. 1, pp. 148-151. 2003 Vol. 424, Iss. 1, (2003): 148-151.You might have access to this document
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