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Fractal phenomenon during fabricating ultrthin silicon membrane using etching-stop.
Yang, Daohong; Xu, Chen; Dong, Dianhong; Zhang, Jianming; Yang, Qiming; et al. Bandaoti Xuebao (Chin. J. Semicond.) Vol. 26, Iss. 1, (Jan. 2005): 67-71.You might have access to this document
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