Defect and diffusion study in boron-implanted silicon
Liu, Jinning.
University of Florida ProQuest Dissertations & Theses, 1996. 9800152.
Document Preview
Copyright information
Database copyright ProQuest LLC; ProQuest does not claim copyright in the individual underlying works.
Access to the complete full text
This is a short preview of the document. Your library or institution may give you access to the complete full text for this document in ProQuest.
Alternatively, you can purchase a copy of the complete full text for this document directly from ProQuest using the option below: