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- Dissertation or Thesis
Comparative evaluation of silicon nitride deposited by sputtering and ECR-PECVD for ACTFEL display devices
Comparative evaluation of silicon nitride deposited by sputtering and ECR-PECVD for ACTFEL display devicesCardenas, Rebecca Teresa.
The University of Texas at El Paso ProQuest Dissertations & Theses, 1997. EP05076.





