Details

Title
Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing
Author
Park, Jucheol; Park, Yeong Gyeong; Min-Ho, Kang; Lee, Myung-Keun; Moon, Seop Hyun
Section
Semiconductors, Heterostructures, and Devices
Publication year
2024
Publication date
2024
Publisher
EDP Sciences
ISSN
22731709
e-ISSN
21174458
Source type
Conference Paper
Language of publication
English
DOI
https://doi.org/10.1051/bioconf/202412924040
ProQuest document ID
3188754501
Copyright
© 2024. This work is licensed under https://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and conditions, you may use this content in accordance with the terms of the License.