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Design, Analysis, and Testing of a Novel 5-DOF Flexure-Based Alignment Stage
Yang, Shang; Li, Yuxia; Chen, Weihai; Chen, Shasha; Wang, Lei; et al. Chinese Journal of Mechanical Engineering = Ji xie gong cheng xue bao Vol. 38, Iss. 1, (Dec 2025): 172.You might have access to this document
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