- Scholarly Journal
Sputtered Silicon as a Potential Masking Material for Glass Micromachining - A Feasibility Study
Joshi, Abhay B; Bodas, Dhananjay; Gangal, S A.
Sensors & Transducers; Toronto Vol. 103, Iss. 4, (Apr 2009): 155-160.
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Copyright International Frequency Sensor Association Apr 2009
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