Micro-Drilling of Polymer Tubular Ultramicroelectrode Arrays for Electrochemical Sensors

Abstract

We present a reproducible fast prototyping procedure based on micro-drilling to produce homogeneous tubular ultramicroelectrode arrays made from poly(3,4-ethylenedioxythiophene) (PEDOT), a conductive polymer. Arrays of Ø 100 µm tubular electrodes each having a height of 0.37 ± 0.06 µm were reproducibly fabricated. The electrode dimensions were analyzed by SEM after deposition of silver dendrites to visualize the electroactive electrode area. The electrochemical applicability of the electrodes was demonstrated by voltammetric and amperometric detection of ferri-/ferrocyanide. Recorded signals were in agreement with results from finite element modelling of the system. The tubular PEDOT ultramicroelectrode arrays were modified by prussian blue to enable the detection of hydrogen peroxide. A linear sensor response was demonstrated for hydrogen peroxide concentrations from 0.1 mM to 1 mM.