Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor

Abstract

A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With a mass detection limit of ~2 pg/mm2 and response time of 1 second, the sensor coated with a polymer sensing material can detect ppb-level ozone in air. The sensor is integrated into a miniaturized wearable device containing a detection circuit, filtration, battery and wireless communication chip, which is ideal for personal and microenvironmental chemical exposure monitoring.