A Wireless LC Sensor Coated with Ba0.9Bi0.066TiO3 for Measuring Temperature

Abstract

This paper presents a passive LC wireless sensor for measuring temperature. The sensor is designed as a parallel connection of a spiral inductor and an interdigitated capacitor and it was fabricated in a conductive layer using LTCC (Low Temperature Co-fired Ceramic) technology. The inderdigitated capacitor electrodes were coated with a thin film of bismuth doped barium titanate (Ba0.9Bi0.066TiO3), whose permittivity changes with temperature, which directly induces changes in the capacitance of the interdigitated capacitor and consequently changes the resonant frequency of the sensor. The measurements of S-parameter of the sensor were performed using a Vector Network Analyzer (E5071B, Agilent Technologies, Santa Clara, CA, USA), whose port was connected to the antenna coil that was placed around the sensor in order to be able to wirelessly detect temperature, in the temperature range from 25 °C to 165 °C.