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Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges
Mitrakos, Vasileios; Macintyre, Lisa; Denison, Fiona C; Hands, Philip JW; Marc PY Desmulliez.
Micromachines; Basel Vol. 8, Iss. 2, (2017): 41.
DOI:10.3390/mi8020041
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