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Activation of sputter-processed indium-gallium-zinc oxide films by simultaneous ultraviolet and thermal treatments
Tak, Young Jun; Du Ahn, Byung; Park, Sung Pyo; Kim, Si Joon; Song, Ae Ran
; et al.
Scientific Reports (Nature Publisher Group); London Vol. 6, (Feb 2016): 21869.
DOI:10.1038/srep21869
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