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Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
Tran, Binh Tinh; Hirayama, Hideki; Maeda, Noritoshi; Jo, Masafumi; Toyoda, Shiro
; et al.
Scientific Reports (Nature Publisher Group); London Vol. 5, (Oct 2015): 14734.
DOI:10.1038/srep14734
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