Abstract

In this study, we propose a self-activated radical doping (SRD) method on the catalyzed surface of amorphous oxide film that can improve both the electrical characteristics and the stability of amorphous oxide films through oxidizing oxygen vacancy using hydroxyl radical which is a strong oxidizer. This SRD method, which uses UV irradiation and thermal hydrogen peroxide solution treatment, effectively decreased the amount of oxygen vacancies and facilitated self-passivation and doping effect by radical reaction with photo-activated oxygen defects. As a result, the SRD-treated amorphous indium-gallium-zinc oxide (a-IGZO) thin film transistors (TFTs) showed superior electrical performances compared with non-treated a-IGZO TFTs. The mobility increased from 9.1 to 17.5 cm2/Vs, on-off ratio increased from 8.9 × 107 to 7.96 × 109, and the threshold voltage shift of negative bias-illumination stress for 3600 secs under 5700 lux of white LED and negative bias-temperature stress at 50 °C decreased from 9.6 V to 4.6 V and from 2.4 V to 0.4 V, respectively.

Details

Title
The self-activated radical doping effects on the catalyzed surface of amorphous metal oxide films
Author
Kim, Hong Jae 1 ; Young, Jun Tak 2 ; Park, Sung Pyo 2 ; Na, Jae Won 2 ; Kim, Yeong-gyu 2 ; Hong, Seonghwan 2 ; Kim, Pyeong Hun 3 ; Kim, Geon Tae 3 ; Byeong Koo Kim 3 ; Kim, Hyun Jae 2 

 School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea; LG Display Co., Ltd., 1007, Deogeun-ri, Wollong-myeon, Paju-si, Gyeonggi-do, Republic of Korea 
 School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea 
 LG Display Co., Ltd., 1007, Deogeun-ri, Wollong-myeon, Paju-si, Gyeonggi-do, Republic of Korea 
Pages
1-9
Publication year
2017
Publication date
Sep 2017
Publisher
Nature Publishing Group
e-ISSN
20452322
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
1957776372
Copyright
© 2017. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.