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Towards chemically neutral carbon cleaning processes: Plasma cleaning of Ni, Rh, and Al reflective optical coatings and thin Al filters for Free Electron Lasers and synchrotron beamline applications
H Moreno Fernández; Zangrando, M; Sauthier, G; Goñi, A R; Carlino, V; et al. arXiv.org, Mar 5, 2018.You might have access to this document
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