Abstract

A method of fabricating multilayer focusing mirrors that can focus X-rays down to 10 nm or less was established in this study. The wavefront aberration induced by multilayer Kirkpatrick–Baez mirror optics was measured using a single grating interferometer at a photon energy of 9.1 keV at SPring-8 Angstrom Compact Free Electron Laser (SACLA), and the mirror shape was then directly corrected by employing a differential deposition method. The accuracies of these processes were carefully investigated, considering the accuracy required for diffraction-limited focusing. The wavefront produced by the corrected multilayer focusing mirrors was characterized again in the same manner, revealing that the root mean square of the wavefront aberration was improved from 2.7 (3.3) rad to 0.52 (0.82) rad in the vertical (horizontal) direction. A wave-optical simulator indicated that these wavefront-corrected multilayer focusing mirrors are capable of achieving sub-10-nm X-ray focusing.

Details

Title
Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors
Author
Matsuyama, S 1   VIAFID ORCID Logo  ; Inoue, T 1 ; Yamada, J 1 ; Kim, J 2   VIAFID ORCID Logo  ; Yumoto, H 3 ; Inubushi, Y 4 ; Osaka, T 5 ; Inoue, I 5 ; Koyama, T 3 ; Tono, K 4 ; Ohashi, H 3 ; Yabashi, M 5   VIAFID ORCID Logo  ; Ishikawa, T 5 ; Yamauchi, K 6 

1  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka, Japan 
2  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka, Japan; Pohang Accelerator Laboratory, Pohang, Gyeongbuk, Republic of Korea 
3  Japan Synchrotron Radiation Research Institute, Sayo-gun, Hyogo, Japan 
4  Japan Synchrotron Radiation Research Institute, Sayo-gun, Hyogo, Japan; RIKEN SPring-8 Center, Sayo, Hyogo, Japan 
5  RIKEN SPring-8 Center, Sayo, Hyogo, Japan 
6  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka, Japan; Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Osaka, Japan 
Pages
1-10
Publication year
2018
Publication date
Nov 2018
Publisher
Nature Publishing Group
e-ISSN
20452322
Source type
Scholarly Journal
Language of publication
English
DOI
https://doi.org/10.1038/s41598-018-35611-0
ProQuest document ID
2139098881
Copyright
© 2018. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.