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Post-CMOS Compatible Aluminum Scandium Nitride/2D Channel Ferroelectric Field-Effect-Transistor
Liu, Xiwen; Wang, Dixiong; Zheng, Jeffrey; Musavigharavi, Pariasadat; Miao, Jinshui; et al. arXiv.org, Oct 22, 2020.You might have access to this document
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