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Abstract
The addition of active, nonlinear, and nonreciprocal functionalities to passive piezoelectric acoustic wave technologies could enable all-acoustic and therefore ultra-compact radiofrequency signal processors. Toward this goal, we present a heterogeneously integrated acoustoelectric material platform consisting of a 50 nm indium gallium arsenide epitaxial semiconductor film in direct contact with a 41° YX lithium niobate piezoelectric substrate. We then demonstrate three of the main components of an all-acoustic radiofrequency signal processor: passive delay line filters, amplifiers, and circulators. Heterogeneous integration allows for simultaneous, independent optimization of the piezoelectric-acoustic and electronic properties, leading to the highest performing surface acoustic wave amplifiers ever developed in terms of gain per unit length and DC power dissipation, as well as the first-ever demonstrated acoustoelectric circulator with an isolation of 46 dB with a pulsed DC bias. Finally, we describe how the remaining components of an all-acoustic radiofrequency signal processor are an extension of this work.
Radio frequency signal processing (RFSP) currently involves a mix of components with differing operation principles, which hinders miniaturisation. Here, Hackett et al. succeed in creating acoustic non-reciprocal circulators, amplifiers, and passive filters, paving the way for all acoustic single-chip RFSP.
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1 Sandia National Laboratories, Microsystems Engineering, Science, and Applications, Albuquerque, USA (GRID:grid.474520.0) (ISNI:0000000121519272)