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Abstract
Cu2O is a promising p-type semiconductor for low-cost photovoltaics and transparent optoelectronics. However, low-cost and low-temperature fabrication of Cu2O films with good transport properties remains challenging, thus limiting their widespread adoption in devices. Here, we report Cu2O thin films of 20–80 nm thickness with hole mobility up to 92 cm2V−1s−1 using atmospheric-pressure spatial atomic layer deposition at temperatures below 260 °C, from a copper (I) hexafluoro-2,4-pentanedionate cyclooctadiene precursor. Raman spectroscopy indicates the presence of copper split vacancies and shows that the high hole mobility can be correlated to a low concentration of shallow acceptor defects. The optical bandgap of deposited films can be tuned between 2.08 eV and 2.5 eV, depending on the deposition temperature. All-oxide semitransparent Cu2O/ZnO solar harvesters are fabricated, showing efficiency values comparable to devices that incorporate much thicker Cu2O layers. Our work provides a promising approach towards cost-efficient, all-oxide solar harvesters, and for other (opto)electronic devices.
Semiconducting Cu2O is attractive for photovoltaic and optoelectronic devices, though balancing high hole mobility with low-cost fabrication is challenging. Here, Cu2O thin films with high hole mobility of 92 cm²V−1s−1 are deposited in air, and applied in a semi-transparent solar harvester.
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1 Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, Grenoble, France (GRID:grid.463753.0) (ISNI:0000 0004 0386 4138); Univ. Grenoble Alpes, Univ. Savoie Mont Blanc, CNRS, Grenoble INP, IMEP-LaHC, Grenoble, France (GRID:grid.462157.3) (ISNI:0000 0004 0382 8823); Univ. Grenoble Alpes, CNRS, Grenoble INP, SIMAP, Grenoble, France (GRID:grid.5676.2) (ISNI:0000000417654326)
2 Phenikaa University, Faculty of Materials Science and Engineering, Hanoi, Vietnam (GRID:grid.511102.6) (ISNI:0000 0004 8341 6684)
3 Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, Grenoble, France (GRID:grid.463753.0) (ISNI:0000 0004 0386 4138)
4 Univ. Grenoble Alpes, Univ. Savoie Mont Blanc, CNRS, Grenoble INP, IMEP-LaHC, Grenoble, France (GRID:grid.462157.3) (ISNI:0000 0004 0382 8823)
5 Univ. Grenoble Alpes, CNRS, Grenoble INP, SIMAP, Grenoble, France (GRID:grid.5676.2) (ISNI:0000000417654326)