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Abstract
Some fundamental problems of mathematical modeling of processes to get coatings using vacuum ion-plasma method have been formulated. It has been introduce a notion of an active surface zone to describe non-thermal activation. It has been shown that non-thermal activation processes can be explained because of the surface focuson effect. Main evolution stages of conversion of absorbed particles have been described based on probability theory. Some general theoretical relations applied in the theory of formation of a new phase on a surface of a solid body have been defined.
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1 Samara National Research University, 34, Moskovskoe Highway, Samara, 443086, Russian Federation