Abstract

This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolution of 0.08 eV at Al L- Fermi edge is shown with current optics using a fine pixel detector. The spectral mapping technique can show chemical shift images by using an appropriate region-of-interest energy window. L-emissions of 3d transition metal elements inform one not only of the density of states of bonding but also the number of outer shell or 3d electrons. Furthermore, progress leading to improvements in the detection efficiency has resulted in more than three times increase in the B K-emission peak. Testing and evaluation of new high energy-resolution spectrometer for EPMA, and a new calibration procedure for C K-peak on graphite has resulted in improved energy calibration procedure is presented.

Details

Title
Recent developments in soft X-ray emission spectroscopy microscopy
Author
Terauchi, M 1 ; Hatano, T 1 ; Koike, M 2 ; Pirozhkov, A S 2 ; Sasai, H 3 ; Nagano, T 3 ; Takakura, M 4 ; Murano, T 4 

 Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, 2-1-1 Katahira, 980-8577 Sendai, Japan 
 National Institutes for Quantum and Radiological Science and Technology, Quantum Beam Science Research Directorate, 619-0125 Kizugawa, Japan 
 Shimadzu Corp., Device Department, 604-8511 Kyoto, Japan 
 JEOL Ltd., SA Business Unit, 196-8558 Akishima, Japan 
Publication year
2020
Publication date
Jul 2020
Publisher
IOP Publishing
ISSN
17578981
e-ISSN
1757899X
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2562613731
Copyright
© 2020. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.