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Abstract
A piezoelectric micropump with four flexible valves is proposed and its mechanism is researched. In the micropump chamber four asymmetric flexible valves are used to achieve single direction flow. The instantaneous velocities are analyzed and the peak input and output velocities are 0.14 m/s and 0.2 m/s respectively. The net flow rate is calculated, which is about 2.5×10-11m3/s. Due to the low operating frequency, flexible valves structure, no heat and no restriction on transport fluid type, this kind of micropump can be used for liquid transport and other biological sample containing DNA.
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Details
1 School of Information Science and Engineering, University of Jinan, Jinan 250029, China; Shandong Provincial Key Laboratory of Network based Intelligent Computing, Jinan 250029, China
2 School of Control Science and Engineering, Shandong University, Jinan 250061, China