Abstract

Calculational analysis of different scattering mechanisms of two-dimensional electron gas in AlGaN/(AlN)/GaN and InAlN/(AlN)/GaN high-electron mobility transistors was carried out. It was found that the mobility of AlGaN-based structures at room temperature is mainly limited by inherent scattering mechanisms (namely, optical and acoustic phonon scattering), while the mobility in our InAlN-based structures is limited by the interface roughness scattering. The low-temperature mobility is found to be limited by the interface roughness scattering for both AlGaN- and InAlN-based structures.

Details

Title
Carrier mobility in the channel of AlGaN/(AlN)/GaN and InAlN/(AlN)/GaN heterostructures, limited by different scattering mechanisms: experiment and calculation
Author
Arteev, D S 1 ; Sakharov, A V 1 ; Lundin, W V 1 ; Zakheim, D A 1 ; Zavarin, E E 1 ; Tsatsulnikov, A F 2 

 Ioffe Institute, 26 Politekhnicheskaya, 194021 St. Petersburg, Russia 
 Submicron Heterostructures for Microelectronics, Research & Engineering Center, RAS, 26 Politekhnicheskaya, 194021 St. Petersburg, Russia 
Publication year
2019
Publication date
Nov 2019
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2568281435
Copyright
© 2019. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.