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Abstract
Present work reports the results of activities intended to reach thin Si(Li) detector entrance window on the diffusive lithium layer side. It was established that the new n-contact represented by a heterostructure of unalloyed amorphous n-type silicon a-Si:H allows one to achieve the entrance window thickness 3 – 4 orders of magnitude smaller than the lithium-side entrance window of standard Si(Li) detectors. The films of amorphous silicon were synthesized with MASD (magnetron assisted silane decomposition) method in mixture of SiH4 (25%) and Ar (75%) gases. Lithium layer surface resistivity and silicon target type (n- or p-) affection on electrical properties of Si(Li) detector contact produced were studied. The investigation performed had led to a technology of Si(Li) detector production with thickness of the entrance window on the diffusive lithium layer side below 0.1 µm.
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Details
1 Saint-Peterburg State University, St. Petersburg, Russia
2 NRC “Kurchatov Institute” - PNPI, Gatchina, Russia
3 Ioffe Physical-Technical Institute of the Russian Academy of Sciences, St. Petersburg, Russia
4 “NTC TPT” ltd., St. Petersburg, Russia