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Abstract
Highly charged ions (HCIs) are an efficient tool for the perforation of suspended 2D materials. Only a fraction of their potential energy is transferred to the atomically thin target during the very short interaction time and is available for pore formation. Charge exchange spectra were measured for highly charged xenon ions transmitted through suspended, single layer MoS2 in order to determine the deposited potential energy available for pore formation. Additionally, charge exchange dependent ion stopping responsible for kinetic sputtering was measured simultaneously.
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Details
1 Helmholtz-Zentrum Dresden-Rossendorf, Ion Beam Center, Dresden, Germany; Technische Universität Dresden, Dresden, Germany
2 TU Wien, Institute of Applied Physics, Vienna, Austria
3 University of Vienna, Faculty of Physics, Vienna, Austria
4 Federal University of Rio Grande do Sul, Ion Implantation Laboratory, Porto Alegre, Brasil
5 Helmholtz-Zentrum Dresden-Rossendorf, Ion Beam Center, Dresden, Germany
6 University Duisburg-Essen, Faculty of Physics and CENIDE, Duisburg, Germany
7 Helmholtz-Zentrum Dresden-Rossendorf, Ion Beam Center, Dresden, Germany; TU Wien, Institute of Applied Physics, Vienna, Austria