Abstract

The properties of thin carbon films obtained by the deposition of carbon in CH4 - plasma on the surface of various substrates (Si, SiO2 and quartz glass) and subsequent annealing at 650 to 800 °C were investigated. The sizes of graphene domains from 5 to 15 nm from Raman spectra were determined which increases with rising temperature on synthesis of carbon films. Also, sizes of graphene domains were estimated based on the electrical conductivities of obtained carbon films, and their values were equal ∼10.8 nm. The Efros-Shklovskii variable-range hopping (ES-VRH) conduction mechanism is replaced by percolation conductivity with increasing temperature from 650 to 800° C. When using Si substrates, the hopping mechanism was not observed at all temperatures.

Details

Title
Influence of Substrates on Conductivity of Thin Carbon Films Deposited by Methane Plasma and Subsequent Annealed
Author
Neustroev, E P 1 ; Prokopiev, A R 1 ; Popov, V I 1 

 M Ammosov North-Eastern Federal University, Yakutsk, Republic of Sakha, Russia 
Publication year
2020
Publication date
Aug 2020
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2570663371
Copyright
© 2020. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.