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Study on the Growth of Microcrystalline Silicon Films in Atmospheric-Pressure VHF Plasma Using Porous Carbon Electrode
Ohmi, H; Yamada, T; Hirano, A; Tsushima, T; Yasutake, K.
Journal of Physics: Conference Series; Bristol Vol. 417, Iss. 1, (Mar 2013).
DOI:10.1088/1742-6596/417/1/012052
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