Abstract

Piezoelectric vibration energy harvesters (VEHs) with unimorph structure have been developed using Si micro-electrical mechanical systems (MEMS) technology. Since we revealed that (100) epitaxial BiFeO3 (BFO) piezoelectric films have high figure-of-merit on energy conversion, (100)-oriented BFO films have been prepared on (100)-oriented LaNiO3 bottom electrodes by the sol-gel method. We fabricated the piezoelectric VEHs using BFO films with resonance frequencies of ~100 Hz. The maximum output power density of these VEHs was determined to be 10.5 μWmm−3G−2 (G=9.8 ms−2) at a load resistance of 1 MΩ, which exceeds or is comparable to those of the best-performing VEHs using other piezoelectric films.

Details

Title
Development of Piezoelectric MEMS Vibration Energy Harvester Using (100) Oriented BiFeO3 Ferroelectric Film
Author
Murakami, S 1 ; Yoshimura, T 2 ; Satoh, K 1 ; Wakazono, K 2 ; Kariya, K 2 ; Fujimura, N 2 

 Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi, Osaka 594-1157, Japan 
 Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka 599-8531, Japan 
Publication year
2013
Publication date
Dec 2013
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2577587051
Copyright
© 2013. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.