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Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron Microscope
Amari, H; Lari, L; Zhang, H Y; Geelhaar, L; Chèze, C
; et al.
Journal of Physics: Conference Series; Bristol Vol. 326, Iss. 1, (Nov 2011).
DOI:10.1088/1742-6596/326/1/012028
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